This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Applied Materials, Inc.. Active years: 2025-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2025-2026
Title: Uwe P Haller: Innovator in Wafer Processing Technology
Introduction
Uwe P Haller is a notable inventor based in San Jose, California. He has made significant contributions to the field of wafer processing equipment. His innovative approach has led to the development of a unique patent that enhances the efficiency of heating systems used in semiconductor manufacturing.
Latest Patents
Uwe P Haller holds a patent for a "Multi-zone heater control for wafer processing equipment." This invention provides a method for supplying power to multiple heaters across different zones in wafer-processing equipment. The technology involves supplying voltage to various power leads that connect to different heating zones in a pedestal. It also includes a mechanism for receiving current through a shared return lead, allowing for efficient operation. The design enables the switching of voltage polarity, which can facilitate simultaneous DC chucking operations to hold substrates securely. Additionally, the duty cycling of heating zones minimizes current through the shared return lead, optimizing performance.
Career Highlights
Uwe P Haller is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve wafer processing efficiency. His contributions have been instrumental in enhancing the capabilities of semiconductor manufacturing processes.
Collaborations
Uwe has collaborated with several talented individuals in his field, including Kiyki-Shiy N Shang and Dmitry A Dzilno. These collaborations have fostered innovation and have contributed to the development of cutting-edge technologies in wafer processing.
Conclusion
Uwe P Haller's innovative work in wafer processing technology exemplifies the impact of dedicated inventors in the semiconductor industry. His patent for multi-zone heater control showcases his commitment to improving manufacturing processes. His contributions continue to influence advancements in the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile