This inventor holds 2 USPTO granted patents and 6 published patent applications. Top assignee: Applied Materials, Inc.. Active years: 2001-2011.
Company Filing History:
Years Active: 2001-2011
Title: The Innovative Contributions of Ursula Ingeborg Schmidt
Introduction
Ursula Ingeborg Schmidt is a notable inventor based in Dresden, Germany. She has made significant contributions to the field of materials science, particularly in the area of atomic layer deposition (ALD) and etching processes. With a total of 2 patents, her work has advanced the technology used in semiconductor manufacturing.
Latest Patents
One of her latest patents is the "Hafnium oxide ALD process." This invention provides a method and apparatus for performing ALD deposition of hafnium oxide on a substrate. The apparatus includes a process chamber, a precursor delivery subsystem, an oxidizer delivery subsystem, a purge gas subsystem, a solvent flush subsystem, and optional solvent recovery and purification subsystems. The method involves pulsing precursor compounds into the process chamber in sequence, ensuring efficient deposition and cleaning processes.
Another significant patent is the "Method and apparatus for sequentially etching a wafer using anisotropic and isotropic etching." This invention describes an apparatus and method for in-situ etching of a substrate that comprises both a polysilicon layer and an overlying dielectric layer. The method includes an anisotropic etch of the dielectric layer using a first fluorinated gas, followed by an isotropic etch of the underlying polysilicon layer using a second fluorinated gas, all performed without removing the substrate from the chamber.
Career Highlights
Ursula Schmidt is currently employed at Applied Materials, Inc., where she continues to innovate in the field of semiconductor technology. Her work has been instrumental in developing processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Collaborations
Throughout her career, Ursula has collaborated with several talented individuals, including Walter Schoenleber and Michael Schmidt. These collaborations have fostered an environment of innovation and have contributed to the success of her projects.
Conclusion
Ursula Ingeborg Schmidt's contributions to the field of materials science and semiconductor technology are noteworthy. Her innovative patents and collaborative efforts have significantly impacted the industry, showcasing her expertise and dedication to advancing technology.