Ulrich Naeher

Title: Ulrich Naeher: Innovator in Acceleration Sensors and Corrosion Protection

Introduction

Ulrich Naeher is a prominent inventor based in Munich, Germany. He has made significant contributions to the field of micromechanical components, particularly in the development of acceleration sensors and corrosion protection technologies. With a total of 3 patents to his name, Naeher's work has had a substantial impact on the industry.

Latest Patents

One of Naeher's latest patents is an innovative acceleration sensor. This sensor features a mass part that is movably attached over a substrate, with pairs of electrodes arranged in relation to the mass part. The design allows for one electrode of each pair to be positioned beneath the mass part, while the other is situated above it. This configuration enables the application of controllable electrical voltages through an electronic drive circuit, allowing for electrostatic compensation of the mass part's excursions and measurement of inertial forces acting on it.

Another notable patent focuses on corrosion protection for micromechanical metal layers. In this invention, a metal layer intended for use in sensors or actuators is surrounded by a protective layer, such as TiN. This protective layer safeguards against the effects of etchants used in the etching process of a sacrificial layer, like silicon dioxide. The protective layer is produced in two parts, with a supplementary layer conformally deposited into etching holes to ensure comprehensive coverage of the metal layer.

Career Highlights

Ulrich Naeher is associated with Siemens Aktiengesellschaft, a leading global technology company. His work at Siemens has allowed him to push the boundaries of innovation in the field of micromechanics. His expertise in sensor technology and corrosion protection has positioned him as a key figure in advancing these technologies.

Collaborations

Throughout his career, Naeher has collaborated with notable colleagues, including Christofer Hierold and Markus Biebl. These collaborations have fostered an environment of innovation and have contributed to the successful development of various technologies.

Conclusion

Ulrich Naeher's contributions to the fields of acceleration sensors and corrosion protection are noteworthy. His innovative patents and work at Siemens highlight his role as a leading inventor in the industry. Naeher's ongoing efforts continue to shape the future of micromechanical components.