The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 1997
Filed:
Oct. 26, 1995
Applicant:
Inventors:
Ulrich Naeher, Munich, DE;
Emmerich Bertagnolli, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F / ;
U.S. Cl.
CPC ...
216-2 ; 216 11 ; 216 46 ; 216100 ; 1566441 ;
Abstract
A metal layer provided for micromechanical components such as sensors or actuators is surrounded with a protective layer of, for example, TiN for protection against the influence of an etchant that is employed for etching out a cavity in a sacrificial layer of, for example, silicon dioxide. The lower part and the upper part of this protective layer are produced as layers. A supplementary protective layer is conformally deposited into the etching holes produced for etching the cavity out and is anisotropically re-etched, so that the metal layer is also laterally covered by the protective layer.