Company Filing History:
Years Active: 2009-2010
Title: Innovations of Ulrich Kirst in Quartz Glass Technology
Introduction
Ulrich Kirst is a notable inventor based in Mainz, Germany, recognized for his contributions to the field of quartz glass technology. With a total of two patents to his name, he has made significant advancements that cater to the semiconductor industry and laser technology.
Latest Patents
Kirst's latest patents include a holder made from quartz glass for the processing of semiconductor wafers and a method for the production of the holder. This innovative quartz glass is characterized by high purity and resistance to dry etching, making it ideal for environments with etching effects. The invention suggests doping the quartz glass with nitrogen in the near-surface area, maintaining a mean content of metastable hydroxyl groups of less than 30 wt ppm, and ensuring its fictive temperature is below 1250°C. Additionally, the viscosity is required to be at least 10 dPa·s at a temperature of 1200°C. The economic method for producing such quartz glass involves several steps, including melting SiO raw material, dehydration measures, and nitriding treatments.
Another significant patent involves a method for the production of laser-active quartz glass. This method outlines the preparation of a dispersion with a solids content of at least 40 wt.%, which includes SiO nanopowder and doping agents. The process also involves granulation, drying, purification, and sintering to create a blank made from doped quartz glass.
Career Highlights
Ulrich Kirst is currently associated with Heraeus Quarzglas GmbH & Co. KG, a company renowned for its expertise in quartz glass manufacturing. His work has been pivotal in enhancing the quality and functionality of quartz glass products used in various high-tech applications.
Collaborations
Kirst has collaborated with notable colleagues such as Bodo Kuehn and Waltraud Werdecker, contributing to the advancement of quartz glass technologies through teamwork and shared expertise.
Conclusion
Ulrich Kirst's innovative patents and contributions to quartz glass technology have positioned him as a key figure in the semiconductor and laser industries. His work continues to influence advancements in these fields, showcasing the importance of innovation in material science.