Radebeul, Germany

Udo Nothelfer

USPTO Granted Patents = 5 

Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 9(Granted Patents)


Company Filing History:


Years Active: 2011-2018

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5 patents (USPTO):Explore Patents

Title: **Udo Nothelfer: Innovator in Optical Technologies**

Introduction

Udo Nothelfer, an inventive mind based in Radebeul, Germany, has made significant contributions to the field of optical innovations. With a total of five patents under his name, Nothelfer is known for his work in enhancing the performance and efficiency of optical systems, particularly in the area of extreme ultraviolet (EUV) lithography.

Latest Patents

Among his notable contributions, Udo Nothelfer's latest patents include advancements in reflective optical elements and EUV lithography appliances. These innovations focus on a reflective optical element that features a sophisticated protective layer system comprising at least two layers. The system is designed to exhibit a low propensity for contamination, a significant improvement in the field.

The optical characteristics of the protective layer system are strategically selected to align between those of a spacer and an absorber, ensuring enhanced performance. The careful choice of materials, which possess the smallest possible imaginary part and a real part close to 1 regarding the refractive index, leads to a plateau-type reflectivity course that optimizes functionality based on the protective layer system's thickness. This meticulous approach helps achieve exceptional reflective properties that meet the demanding specifications needed in modern EUV lithography appliances.

Career Highlights

Udo Nothelfer's career has been marked by his association with Carl Zeiss SMT GmbH, a leading company in the optics and precision engineering industry. His innovations have played a crucial role in pushing the boundaries of optical technology, particularly in advanced lithography applications.

Collaborations

Throughout his career, Nothelfer has collaborated with esteemed colleagues such as Johann Trenkler and Hans-Juergen Mann. These partnerships have contributed to the success of various projects, leading to cutting-edge innovations within the optical field.

Conclusion

Udo Nothelfer stands as a testament to the impact that dedicated inventors can have in the realm of technology. With his groundbreaking patents, particularly in reflective optical elements and EUV lithography appliances, he continues to pave the way for advancements that hold promise for the future of optics. His work not only enhances efficiency but also significantly reduces contamination risks, a vital attribute for the industry's progress.

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