Company Filing History:
Years Active: 2001
Title: Innovations of Tung-Ching Tseng
Introduction
Tung-Ching Tseng is a notable inventor based in Sunnyvale, CA. He has made significant contributions to the field of process material control in deposition chambers. His innovative approach has led to the development of a unique apparatus that enhances the efficiency of material flow in various applications.
Latest Patents
Tung-Ching Tseng holds a patent for an "Apparatus and method for controlling a flow of process material to a deposition chamber." This invention includes an injector valve that is strategically placed between the process material source and the deposition chamber. The injector valve is designed to control the flow of precursor material by repeatedly opening and closing with a predetermined duty cycle. Additionally, the apparatus features an evaporator that is coupled to the injector valve for the purpose of evaporating the precursor.
Career Highlights
Tung-Ching Tseng is currently employed at Applied Materials, Inc., a leading company in the semiconductor and materials engineering industry. His work at Applied Materials has allowed him to focus on advancing technologies that improve manufacturing processes.
Collaborations
Some of his notable coworkers include Keith K Koai and James J Chen, who have also contributed to various projects within the company.
Conclusion
Tung-Ching Tseng's innovative work in controlling process material flow has made a significant impact in the field of deposition technology. His patent and contributions at Applied Materials, Inc. highlight his role as a key inventor in this area.