Applied Materials, Inc.

Tung-Ching Tseng

John Vincent Schmitt

Keith K Koai

Mark S Johnson

James J Chen

Sean Li

An apparatus and method for controlling a flow of process material to a deposition chamber. The apparatus comprises an injector valve, disposed between the process material source and the deposition chamber. The injector valve controls the flow of precursor material by repeatedly opening and closing the injector valve with a predetermined duty cycle. The apparatus further comprises an evaporator coupled to the injector valve for evaporating the precursor.

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Sunnyvale, CA, United States of America

Tung-Ching Tseng