This inventor holds 3 USPTO granted patents and 9 published patent applications. Top assignee: Lam Research Corporation. Active years: 2024-2026.
Company Filing History:
Years Active: 2024-2026
Title: Innovations by Inventor Tu Hong
Introduction
Tu Hong is a notable inventor based in Tualatin, OR (US). He has made significant contributions to the field of substrate processing systems, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of electrostatic chuck (ESC) systems.
Latest Patents
One of Tu Hong's latest patents is titled "Undercoating coverage and resistance control for ESCS of substrate processing systems." This patent describes an electrostatic chuck undercoating system that includes a memory and a controller. The memory stores an undercoat application, while the controller is configured to execute this application by determining undercoat parameters. It performs a full clean process to remove undercoat deposits in the processing chamber of the substrate processing system. Based on the undercoat parameters, the controller can perform one or more deposition processes to deposit undercoat layers on the ESC, providing an overall thickness between 7-15 μm. These layers protect the ESC during subsequent substrate deposition processing.
Another significant patent is the "Wafer lift pin mechanism for preventing local backside deposition." This apparatus includes a lift pin designed to raise and lower a semiconductor substrate relative to a substrate support assembly in a processing chamber. The lift pin features a top end with a conical shape tapering downwardly and a bottom end with a cylindrical shape. The apparatus also comprises a lift pin holder to secure the bottom end of the lift pin.
Career Highlights
Tu Hong is currently employed at Lam Research Corporation, where he continues to innovate in the field of semiconductor processing. His work has been instrumental in advancing technologies that improve substrate processing efficiency.
Collaborations
Tu Hong collaborates with talented individuals such as Ming Li and Pengyi Zhang, contributing to a dynamic and innovative work environment.
Conclusion
Tu Hong's contributions to substrate processing systems through his patents demonstrate his commitment to innovation in the semiconductor industry. His work not only enhances the performance of electrostatic chuck systems but also sets a foundation for future advancements in the field.