Tsuyoshi Shibata

Title: The Innovative Contributions of Tsuyoshi Shibata

Introduction

Tsuyoshi Shibata is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 9 patents. His work focuses on enhancing the efficiency and accuracy of substrate processing systems, which are crucial in various technological applications.

Latest Patents

Among his latest patents, Shibata has developed a substrate processing system and method. This system includes a resist pattern forming apparatus with modules designed to perform specific processes on a substrate with an underlying film. Additionally, it features an etched pattern forming apparatus that utilizes chambers for patterning the underlying film using a resist pattern as a mask. The system is equipped with examination devices that measure and analyze pattern attributes on the substrate after processing. A controller is integrated to utilize measurement results for calculating correction value ranges, ensuring that the pattern attributes align with predetermined values for each substrate.

Another notable patent involves a substrate processing method that corrects the processing temperature based on measurements of resist pattern dimensions. This method classifies the distribution of dimensions into linear and nonlinear components, allowing for precise adjustments in processing conditions. The combination of thermal processing and exposure processing under corrected conditions enables the formation of predetermined patterns on substrates.

Career Highlights

Tsuyoshi Shibata is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His role involves developing innovative solutions that enhance substrate processing technologies. His expertise and contributions have positioned him as a key figure in his field.

Collaborations

Shibata has collaborated with notable colleagues, including Takahisa Otsuka and Kunie Ogata. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Tsuyoshi Shibata's work in substrate processing has led to significant advancements in the industry. His patents reflect a commitment to innovation and excellence, making him a valuable contributor to the field. His ongoing efforts continue to shape the future of substrate processing technologies.