Tseng-Chung Lee

Title: Innovations of Tseng-Chung Lee

Introduction

Tseng-Chung Lee is a notable inventor based in Lexington, MA (US). He has made significant contributions to the field of gas delivery systems, holding a total of 3 patents. His work is characterized by innovative solutions that enhance the efficiency and functionality of mass flow controllers.

Latest Patents

One of Tseng-Chung Lee's latest patents is a system for and method of fast pulse gas delivery. This system is designed to deliver pulses of a desired mass of gas to a tool. It comprises a mass flow controller that includes a flow sensor, a control valve, and a dedicated controller. This controller is configured to receive a recipe of a sequence of steps for opening and closing the control valve, allowing for the delivery of a sequence of gas pulses based on the recipe. The mass flow controller can operate in at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Additionally, the dedicated controller can deliver pulses of gas according to three different types of pulse gas delivery processes: a time-based pulse delivery process, a mole-based pulse delivery process, and a profile-based pulse delivery process.

Career Highlights

Tseng-Chung Lee is currently employed at MKS Instruments, Inc., where he continues to develop innovative technologies in gas delivery systems. His expertise in this area has positioned him as a key contributor to advancements in the field.

Collaborations

Throughout his career, Tseng-Chung Lee has collaborated with notable colleagues, including Junhua Ding and Michael L'Bassi. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies.

Conclusion

Tseng-Chung Lee's contributions to the field of gas delivery systems exemplify his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving efficiency and functionality in mass flow control applications.