Company Filing History:
Years Active: 2024-2025
Title: Tse-An Yeh: Innovator in Semiconductor Technology
Introduction
Tse-An Yeh is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to solving complex challenges in the industry.
Latest Patents
One of his latest patents is titled "High quantum efficiency dry resist for low exposure dose of EUV radiation." This patent provides a module for creating a metal-containing film, which includes a reactor chamber, an inlet for providing an organo-metallic precursor, and an inlet for a reactive gaseous species. The reactive gaseous species is designed to react with the organo-metallic precursor to form a metal-containing film, which is crucial for advanced semiconductor applications.
Another notable patent is the "Phase-shift reticle for use in photolithography." This invention involves a phase-shift reticle that enhances the photolithography process in semiconductor fabrication. The reticle comprises a substrate, a reflective structure, a pattern defining layer, and a phase shifter. The unique design of the phase shifter, which has a different transmittance compared to the first material, allows for improved precision in semiconductor manufacturing.
Career Highlights
Tse-An Yeh is currently employed at Entegris, Inc., a company known for its advanced materials and solutions for the semiconductor industry. His work at Entegris has positioned him as a key player in the development of innovative technologies that drive the industry forward.
Collaborations
Throughout his career, Tse-An Yeh has collaborated with talented individuals such as Montray Leavy and Chun Kuang Chen. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Tse-An Yeh's contributions to semiconductor technology through his patents and work at Entegris, Inc. highlight his role as an influential inventor in the field. His innovative solutions continue to shape the future of semiconductor manufacturing.