Tsang-Yang Liu

Title: Innovations of Tsang-Yang Liu

Introduction

Tsang-Yang Liu is a notable inventor based in Changhua County, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of preventing defects during the manufacturing process. With a total of three patents to his name, Liu's work has had a substantial impact on the industry.

Latest Patents

Liu's latest patents include an "Apparatus for preventing backside peeling defects on semiconductor wafers." This innovative apparatus features a susceptor and a non-reactive gas source. The susceptor is designed with through holes and a wafer support surface. Each through hole contains a lift pin and a lift pin head, allowing for vertical motion to lift or place a wafer on the susceptor. The lift pin head incorporates a flow channel structure that facilitates the flow of gas to the backside of the wafer, effectively preventing defects. Another patent, titled "Apparatus and system for preventing backside peeling defects on semiconductor wafers," shares similar features and functions, further showcasing Liu's expertise in this critical area of semiconductor manufacturing.

Career Highlights

Tsang-Yang Liu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His role at the company allows him to apply his innovative ideas and contribute to advancements in semiconductor technology.

Collaborations

Liu has collaborated with several talented individuals in his field, including Yen-Yu Chen and Wei-Jen Chen. These collaborations have likely enhanced the development and implementation of his innovative ideas.

Conclusion

Tsang-Yang Liu's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and excellence in the field. His work continues to influence the industry and pave the way for future advancements.