Chu-Pei, Taiwan

Tsang-Mu Lai

This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2007.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Tsang-Mu Lai. Retrieved from https://idiyas.com/inventor/tsang-mu-lai

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile


% Patents Active = 100.0

Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2007

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1 patent (USPTO):Explore Patents

Title: Tsang-Mu Lai: Innovator in MEMS Technology

Introduction

Tsang-Mu Lai is a prominent inventor based in Chu-Pei, Taiwan. He has made significant contributions to the field of micro-electromechanical systems (MEMS). His innovative approach has led to the development of a unique method for manufacturing MEMS structures.

Latest Patents

Tsang-Mu Lai holds a patent for a "Method for manufacturing MEMS structures." This patent outlines a process that includes providing a substrate, blanket depositing a first sacrificial resist layer, exposing and developing the first sacrificial resist layer, and subjecting it to a hard bake process. The method ultimately allows for the formation of a free-standing micro-structural member, which is crucial for various applications in MEMS technology.

Career Highlights

Tsang-Mu Lai is associated with Taiwan Semiconductor Manufacturing Company Limited, where he applies his expertise in semiconductor manufacturing. His work has been instrumental in advancing MEMS technology, which is vital for modern electronic devices.

Collaborations

He has collaborated with notable colleagues, including Ming-Chih Chang and H Shu Wu. These partnerships have fostered innovation and contributed to the success of their projects.

Conclusion

Tsang-Mu Lai's contributions to MEMS technology through his innovative patent and collaborations highlight his role as a key figure in the field. His work continues to influence advancements in semiconductor manufacturing and micro-structural applications.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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