Company Filing History:
Years Active: 2003-2005
Title: The Innovative Contributions of Tri Le in Semiconductor Technology
Introduction
Tri Le is an accomplished inventor based in Milpitas, California, known for his contributions to the field of semiconductor manufacturing. With two patents to his name, he has developed methods that significantly enhance the efficiency and effectiveness of integrated circuit fabrication.
Latest Patents
Tri Le's latest patents showcase his expertise in advanced etching techniques. The first patent, titled "Etching a metal hard mask for an integrated circuit structure," describes a method that involves etching a metal hard mask layer using a gas mixture including fluorine and oxygen. This innovative process allows for vialiable or trench etching while also enabling the removal of a photoresist layer without compromising the integrity of the metal hard mask.
His second patent, "Plasma etching of organic antireflective coating," details a semiconductor manufacturing process that employs a fluorine-free etchant gas. By utilizing a combination of carbon-containing, nitrogen-containing, and optional oxygen-containing gases, the technique achieves an etch rate for the organic anti-reflective coating that is significantly higher than that of the underlying dielectric layer. This process is particularly beneficial for creating contact or via openings in damascene and self-aligned contact structures.
Career Highlights
Tri Le is currently a key figure at Lam Research Corporation, a leader in the semiconductor equipment industry. His innovative approaches and technical knowledge have contributed to advancements in semiconductor processing technologies that are vital for producing the microchips powering today’s electronic devices.
Collaborations
At Lam Research Corporation, Tri Le collaborates with talented individuals such as Siyi Li and Sm Rega Sadjadi. Together, they strive to push the boundaries of semiconductor manufacturing and develop innovative solutions that address the challenges faced in the industry.
Conclusion
Tri Le's inventions reflect a deep understanding of semiconductor technology and an unwavering commitment to innovation. His patents not only highlight his creativity but also pave the way for advancements in integrated circuit fabrication, ensuring a brighter future for the semiconductor industry.