This inventor holds 2 USPTO granted patents. Top assignee: Anelva Corporation. Active years: 1989-1990.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1989-1990
Title: Innovations by Toshio Adachi
Introduction
Toshio Adachi is a notable inventor based in Fuchu, Japan. He has made significant contributions to the field of plasma processing and vacuum technology. With a total of 2 patents, his work has advanced the efficiency and effectiveness of processing apparatuses.
Latest Patents
One of Adachi's latest inventions is a plasma processing apparatus. This apparatus comprises a vacuum vessel, an anode, and a cathode arranged within the vessel. It features a discharge producing power source that intermittently generates a main discharge between the anode and cathode to process substrates nearby. The design includes a magnetic field setting device with magnetic coils and alternating current power sources, allowing for increased processing speeds while minimizing temperature rise and potential damage to the substrates.
Another significant patent is a vacuum processing apparatus. This apparatus includes a load-lock chamber, a vacuum transferring chamber, and a processing chamber, each equipped with evacuating systems. The load-lock chamber is designed with isolation valves to manage communication with the atmosphere and the vacuum transferring chamber. The processing chamber is structured to form an air-tight space for substrate processing, enhancing the overall efficiency of the vacuum transferring mechanism.
Career Highlights
Toshio Adachi is associated with Anelva Corporation, where he has contributed to the development of advanced processing technologies. His work has been instrumental in improving the performance of vacuum and plasma processing systems.
Collaborations
Adachi has collaborated with notable colleagues, including Tsutomu Tsukada and Katsumi Ukai. Their combined expertise has fostered innovation within their projects.
Conclusion
Toshio Adachi's contributions to plasma and vacuum processing technologies have made a significant impact in the field. His innovative patents reflect a commitment to advancing technology and improving processing efficiency.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile