This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2016-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2016-2020
Title: Toshinori Kitabata: Innovator in Substrate Processing Technology
Introduction
Toshinori Kitabata is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology, holding 2 patents that showcase his innovative approach to engineering solutions.
Latest Patents
His latest patents include a substrate processing apparatus and a heat transfer sheet adhering apparatus. The substrate processing apparatus features a bearing member with a decaying mechanism designed to decay radicals or ions. This apparatus includes a first member that covers the decaying mechanism and a second member that is in contact with a sealing member. The design allows for an invasion path for radicals to enter, enhancing the efficiency of the processing apparatus. The sealing member is made from a material with a tensile strength greater than 12.1 MPa.
The heat transfer sheet adhering apparatus is designed for adhering a heat transfer sheet to a ring-shaped member used in substrate processing. It consists of a heat transfer sheet mounting part, a ring-shaped member supporting part, and a vertically movable pressing part. This pressing part is engineered to apply pressure gradually from either the inner or outer peripheral side of the ring-shaped member, ensuring a secure adhesion.
Career Highlights
Toshinori Kitabata is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has significantly impacted the efficiency and effectiveness of substrate processing technologies.
Collaborations
He collaborates with talented coworkers such as Kazuya Matsumoto and Yusuke Hayasaka, contributing to innovative projects and advancements in their field.
Conclusion
Toshinori Kitabata's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His inventions continue to influence advancements in semiconductor manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile