Yokohama, Japan

Toshimitu Shibata


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 16(Granted Patents)


Company Filing History:


Years Active: 1997

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1 patent (USPTO):Explore Patents

Title: Toshimitu Shibata: Innovator in Heat Treatment Technology

Introduction

Toshimitu Shibata is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of heat treatment technology, particularly with his innovative designs that enhance the efficiency and accuracy of temperature control in processing vessels.

Latest Patents

Shibata holds a patent for a heat treating apparatus. This apparatus is designed for mounting objects to be treated on a wafer boat, which is placed within a heat insulating cylinder. The invention includes a temperature detecting sensor located in a film depositing area, allowing for precise temperature control of the heating unit. This advancement improves heat response and ensures accurate temperature detection for the objects being treated.

Career Highlights

Throughout his career, Toshimitu Shibata has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Tohoku Limited. His experience in these organizations has contributed to his expertise in heat treatment technologies.

Collaborations

Shibata has collaborated with notable colleagues such as Hirofumi Kitayama and Toshiaki Miyaju. Their combined efforts have furthered advancements in the field of heat treatment.

Conclusion

Toshimitu Shibata's innovative work in heat treatment technology exemplifies the impact of dedicated inventors in advancing industrial processes. His contributions continue to influence the efficiency of temperature control in various applications.

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