Company Filing History:
Years Active: 2010
Title: Toshimasa Kubota: Innovator in Semiconductor Polishing Technology
Introduction
Toshimasa Kubota is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the area of polishing methods and apparatuses. His innovative approach has led to advancements that enhance the efficiency and effectiveness of semiconductor wafer processing.
Latest Patents
Toshimasa Kubota holds a patent for a polishing head, polishing apparatus, and polishing method specifically designed for semiconductor wafers. The invention provides a polishing head that comprises a carrier, a guide ring, a dress ring, and a head body. The head body is rotatable and holds the carrier, guide ring, and dress ring. It features a reversed-bowl shape with a hollow that is sealed. During the polishing process, the pressure within the sealed hollow is adjusted using a pressure regulating mechanism, allowing for elastic deformation of the diaphragm. This design effectively prevents excessive polishing on the outer periphery of the semiconductor wafer, thereby reducing the risk of impressions or scratches on the wafer's edge.
Career Highlights
Toshimasa Kubota is associated with Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor industry. His work has been instrumental in developing technologies that improve the quality and reliability of semiconductor devices. With a focus on innovation, he continues to contribute to advancements in the field.
Collaborations
Toshimasa has collaborated with notable colleagues, including Hiromasa Hashimoto and Yasuharu Ariga. Their combined expertise has fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Toshimasa Kubota's contributions to semiconductor polishing technology exemplify the importance of innovation in the industry. His patented inventions not only enhance the efficiency of wafer processing but also ensure the quality of semiconductor devices. His work continues to influence the field and drive advancements in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.