This inventor holds 1 USPTO granted patent. Top assignee: L'air Liquide,societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude. Active years: 2012.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2012
Title: Toru Sakai: Innovator in Xenon Retrieval Technology
Introduction
Toru Sakai is a prominent inventor based in Nagoya, Japan. He has made significant contributions to the field of semiconductor production processes, particularly in the area of gas retrieval systems. His innovative approach has led to the development of a highly efficient method for retrieving xenon from waste gases.
Latest Patents
Sakai holds a patent for a "Xenon retrieval system and retrieval device." This invention provides a simple and highly pure xenon retrieval method with high efficiency. It functionally removes elements such as water, CO2, and fluorocarbons from waste gases generated during semiconductor production processes, including plasma etching. The system is characterized by its first adsorption means filled with synthetic zeolite with a pore size of 4A or smaller and aluminum oxide, arranged serially. It also includes gas separation means composed of silicone or polyethylene hollow fiber gas separation membrane modules, second adsorption means filled with activated carbon or synthetic zeolite with larger pore sizes, and reaction means filled with calcium compounds as reactants. This innovative design enhances the retrieval efficiency of low-concentration xenon.
Career Highlights
Toru Sakai is associated with L'air Liquide, Société Anonyme Pour L'étude Et L'exploitation Des Procédés Georges Claude. His work at this esteemed company has allowed him to focus on advancing technologies related to gas retrieval and semiconductor processes. His dedication to innovation has positioned him as a key figure in his field.
Collaborations
Sakai has collaborated with notable colleagues, including Masahiro Kimoto and Terumasa Koura. Their combined expertise has contributed to the success of various projects and innovations within the company.
Conclusion
Toru Sakai's contributions to xenon retrieval technology exemplify the impact of innovative thinking in the semiconductor industry. His patent reflects a commitment to enhancing efficiency and purity in gas retrieval processes. Through his work, Sakai continues to influence advancements in technology and environmental sustainability.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile