The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Nov. 30, 2007
Masahiro Kimoto, Tsukuba, JP;
Terumasa Koura, Tsukuba, JP;
Yukio Fukuda, Tsukuba, JP;
Masaki Narazaki, Wako, JP;
Taiji Hashimoto, Ichidawa, JP;
Toru Sakai, Nagoya, JP;
Kazuo Yokogi, Tsukuba, JP;
Masahiro Kimoto, Tsukuba, JP;
Terumasa Koura, Tsukuba, JP;
Yukio Fukuda, Tsukuba, JP;
Masaki Narazaki, Wako, JP;
Taiji Hashimoto, Ichidawa, JP;
Toru Sakai, Nagoya, JP;
Kazuo Yokogi, Tsukuba, JP;
Abstract
To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.