Company Filing History:
Years Active: 2008-2014
Title: **Toru Imai: Innovator in Positional Information Technology**
Introduction
Toru Imai, an accomplished inventor based in Natori, Japan, has made significant contributions to the field of positional information technology. With a portfolio of six patents, Imai's innovations focus largely on encoders and measurement apparatus, showcasing his expertise in the development of advanced optical systems.
Latest Patents
Imai's latest patent involves an encoder that detects positional information of a moving body by generating interference fringes that move in opposite directions. This encoder consists of a light modulation section that modulates light emitted from a light source, a moving member with an incidence plane for light beams, and at least two light receiving sections that capture the generated interference fringes. The innovation enables precise measurements by ensuring that the interference fringes travel in opposite directions in relation to light modulation.
Another significant patent from Imai is a movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method. This invention features a moving grating positioned adjacent to a wafer stage. A light source illuminates the moving grating, which produces diffracted lights that interfere with fixed scales. This arrangement minimizes the size of the wafer stage while enhancing measurement precision, reducing the impact of ambient atmosphere fluctuations on measurements.
Career Highlights
Throughout his career, Toru Imai has been associated with reputable companies such as Nikon Corporation and Sendai Nikon Corporation. His work at these firms has enabled him to explore and refine his innovations, contributing to advancements in optical measurement technology.
Collaborations
Imai has collaborated with notable colleagues, including Susumu Makinouchi and Akihiro Watanabe. Their collective expertise has fostered an environment of innovation, allowing for the development of groundbreaking technologies in the field of positional information.
Conclusion
Toru Imai stands out as a notable inventor in the realm of positional information technology, with a focus on precision measurement and innovative encoding systems. His contributions have not only advanced industry standards but have also paved the way for future innovations in technology.