Toru Hirata

Title: The Innovations of Toru Hirata

Introduction

Toru Hirata is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, Hirata's work has had a considerable impact on the industry.

Latest Patents

Hirata's latest patents include a substrate processing apparatus and a substrate processing method. The first patent describes a substrate processing apparatus that features a substrate holding unit designed to hold a substrate horizontally. It includes a processing liquid supply unit that delivers a processing liquid to the substrate, along with a first processing cup and a second processing cup that are arranged around the substrate holding unit. Additionally, the apparatus is equipped with a drain port, a first exhaust port, a second exhaust port, and a suction port to manage the processing environment effectively. The second patent also focuses on a substrate processing apparatus, which incorporates a gripping mechanism that secures the peripheral edge of a substrate. This design includes a base plate that supports the gripping mechanism and features a liquid drain hole for efficient processing liquid management.

Career Highlights

Hirata is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop innovative solutions that enhance substrate processing techniques.

Collaborations

Hirata collaborates with fellow inventor Yoshinori Ikeda, contributing to advancements in their field through shared expertise and innovative ideas.

Conclusion

Toru Hirata's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a significant inventor in the industry. His innovative designs continue to influence the development of advanced processing techniques.