Toru Hinomura

Title: The Innovative Contributions of Toru Hinomura

Introduction

Toru Hinomura is a prominent inventor based in Osaka, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work has been instrumental in advancing the methods used in semiconductor device fabrication.

Latest Patents

One of Hinomura's latest patents is a method for fabricating a semiconductor device. This method involves several steps, including forming an interlayer insulating film on a substrate and creating a first hard mask formation film on this insulating film. The process includes altering the first hard mask formation film and transferring an interconnect groove pattern to it. This results in the formation of a first hard mask, which is then used to etch the interlayer insulating film, creating an interconnect groove. The first hard mask formation film is composed of a metal film or a metallic compound film.

Another notable patent is for a semiconductor device that features a metal-containing compound layer on a semiconductor substrate. This device includes a dielectric film and a contact hole that penetrates through the dielectric film to reach the metal-containing compound layer. Additionally, it incorporates a contact plug within the contact hole and a manganese oxide layer that extends between the contact plug and the dielectric film.

Career Highlights

Throughout his career, Toru Hinomura has worked with leading companies in the electronics industry, including Panasonic Corporation and Matsushita Electric Industrial Co., Ltd. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.

Collaborations

Hinomura has collaborated with notable colleagues such as Takeshi Harada and Takenobu Kishida. These partnerships have contributed to the advancement of his research and the successful development of his patents.

Conclusion

Toru Hinomura's contributions to semiconductor technology are noteworthy, with several patents that showcase his innovative methods and designs. His work continues to influence the industry and pave the way for future advancements in semiconductor devices.