Location History:
- Cupertino, CA (US) (1978 - 1983)
- Saratoga, CA (US) (1976 - 1986)
Company Filing History:
4 out of 11 
4 out of 147 
2 out of 5,989 
Years Active: 1976-1986
Title: The Innovations of Tor G Larsen
Introduction
Tor G Larsen is a notable inventor based in Saratoga, California. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on precision alignment and measurement systems that enhance the manufacturing processes of integrated circuits.
Latest Patents
One of his latest patents is an auto-focus alignment and measurement system and method. This innovative system is designed for precisely positioning a semiconductor substrate with respect to an integrated circuit mask. It features a moveable convergent lens that works in conjunction with another pair of convergent lenses to alternately focus images of the mask and the substrate onto a photodiode array. The photodiode array acts as a focus detector, providing a feedback signal for controlling the displacement of the moveable lens. This ensures that the separation between the mask and the substrate is equalized with remarkable accuracy. Additionally, the system includes an illumination source and viewing optics that offer a magnified view of both images, facilitating alignment prior to photolithographic printing. The apparatus can also measure the degree of surface flatness and parallelism between the mask and the substrate.
Career Highlights
Throughout his career, Tor G Larsen has worked with several companies, including Kasper Instruments, Inc. and Measurex Corporation. His expertise in semiconductor technology has allowed him to develop systems that significantly improve manufacturing efficiency and accuracy.
Collaborations
Tor has collaborated with notable professionals in his field, including Karl-Heinz Johannsmeier and Paul E Stoft. These collaborations have contributed to the advancement of technologies in semiconductor manufacturing.
Conclusion
Tor G Larsen's innovative contributions to semiconductor technology and his extensive patent portfolio highlight his impact on the industry. His work continues to influence the precision and efficiency of integrated circuit manufacturing processes.