This inventor holds 1 USPTO granted patent. Top assignee: Hitachi, Ltd.. Active years: 1999.
Company Filing History:
Years Active: 1999
Title: Tooru Yukimasa - Innovator in Microwave Plasma Processing
Introduction
Tooru Yukimasa is a notable inventor based in Kudamatsu, Japan. He has made significant contributions to the field of microwave plasma processing, showcasing his expertise through innovative inventions. His work has implications for various applications in technology and manufacturing.
Latest Patents
Tooru Yukimasa holds a patent for a "Microwave plasma processing apparatus and method." This invention relates to a microwave plasma processing apparatus that is designed for generating plasma using microwaves. The apparatus features a circular waveguide where microwaves are tuned by a microwave tuner to match impedance. This allows for the efficient introduction of microwaves into a discharge block, which has a plasma-resistant inner surface. The processing gas is controlled to a predetermined pressure and is converted into a more uniform and dense plasma through the interaction of the microwave electric field and a magnetic field produced by a solenoid coil.
Career Highlights
Tooru Yukimasa is associated with Hitachi, Ltd., a leading company in technology and innovation. His work at Hitachi has allowed him to develop and refine his inventions, contributing to advancements in microwave plasma technology.
Collaborations
Tooru has collaborated with notable coworkers, including Katsuyoshi Kudo and Hironobu Kawahara. Their combined efforts have fostered innovation and development in their respective fields.
Conclusion
Tooru Yukimasa's contributions to microwave plasma processing highlight his role as an influential inventor. His patent and work at Hitachi, Ltd. demonstrate his commitment to advancing technology in this specialized area.