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Fremont, CA, United States of America

Tong Fang

USPTO Granted Patents = 8

Average Co-Inventor Count = 3.9

ph-index = 3

Forward Citations = 22(Granted Patents)

Location History:

Palo Alto, CA (US) (2012)
Fremont, CA (US) (2011 - 2020)

Company Filing History:

Lam Research Corporation

Years Active: 2011-2020

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8 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 10832923 - Lower plasma-exclusion-zone rings for a bevel etcher (2020-11-10),

2. 10811282 - Upper plasma-exclusion-zone rings for a bevel etcher (2020-10-20),

3. 10629458 - Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter (2020-04-21),

4. 8398778 - Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter (2013-03-19),

5. 8349202 - Methods for controlling bevel edge etching in a plasma chamber (2013-01-08),

6. 8323523 - High pressure bevel etch process (2012-12-04),

7. 8262923 - High pressure bevel etch process (2012-09-11),

8. 8083890 - Gas modulation to control edge exclusion in a bevel edge etching plasma chamber (2011-12-27),

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