Location History:
- Palo Alto, CA (US) (2012)
- Fremont, CA (US) (2011 - 2020)
Company Filing History:
Years Active: 2011-2020
Title: Innovations by Inventor Tong Fang
Introduction
Tong Fang is a notable inventor based in Fremont, CA, who has made significant contributions to the field of technology. He holds a total of 8 patents, showcasing his innovative spirit and technical expertise. His work primarily focuses on advancements in etching technology, which is crucial for various applications in semiconductor manufacturing.
Latest Patents
Among his latest patents are two significant inventions related to bevel etchers. The first is the "Lower plasma-exclusion-zone rings for a bevel etcher." This invention is designed to etch the bevel edge of a substrate effectively. The lower plasma-exclusion-zone ring features a ring-shaped body with a radially-outer stepped surface, made from materials such as aluminum oxide, aluminum nitride, silicon, silicon carbide, silicon nitride, and yttria.
The second patent is the "Upper plasma-exclusion-zone rings for a bevel etcher." Similar to the first, this invention is also configured to etch a bevel edge of a substrate. The upper plasma-exclusion-zone ring includes a ring-shaped body with a radially-inner stepped surface, crafted from the same group of materials as the lower ring. These innovations enhance the efficiency and precision of the etching process in semiconductor fabrication.
Career Highlights
Tong Fang is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role involves developing cutting-edge technologies that improve manufacturing processes. His contributions have been instrumental in advancing the capabilities of etching equipment, which is vital for producing high-quality semiconductor devices.
Collaborations
Throughout his career, Tong Fang has collaborated with talented individuals such as Yunsang Kim and George Stojakovic. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
In summary, Tong Fang is a distinguished inventor whose work in etching technology has led to multiple patents and significant advancements in the semiconductor industry. His contributions continue to shape the future of technology and manufacturing processes.