Tong Earn Tay

Title: Innovations by Inventor Tong Earn Tay

Introduction

Tong Earn Tay is a notable inventor based in Singapore, recognized for his contributions to the field of semiconductor technology. He has developed a significant patent that addresses challenges in the adhesion of dielectric films in damascene interconnects. His work is crucial for enhancing the performance and reliability of electronic devices.

Latest Patents

Tong Earn Tay holds a patent titled "Method to improve adhesion of dielectric films in damascene interconnects." This patent outlines a method for improving the adhesion of low dielectric constant films to other dielectric films and barrier metals during the damascene process. One of the methods described involves depositing a low dielectric constant material layer on a substrate, followed by the implantation of silicon ions into this layer. Subsequently, a TEOS-based silicon oxide layer is deposited, ensuring strong adhesion between the two layers. Another method involves the deposition of a silicon-based dielectric layer over the low dielectric constant material, which is not silicon oxide, thereby achieving good adhesion.

Career Highlights

Throughout his career, Tong Earn Tay has demonstrated a commitment to innovation in the semiconductor industry. His work has contributed to advancements in materials science, particularly in the development of dielectric films that are essential for modern electronic applications. His patent reflects his expertise and dedication to improving technology in this field.

Collaborations

Tong Earn Tay has collaborated with notable colleagues, including Luona Goh and Simon Yew-Meng Chooi. These collaborations have likely fostered an environment of innovation and shared knowledge, further enhancing the impact of their work in the industry.

Conclusion

In summary, Tong Earn Tay is a distinguished inventor whose work on improving adhesion in dielectric films has significant implications for the semiconductor industry. His innovative methods contribute to the ongoing advancement of electronic technology.