This inventor holds 1 USPTO granted patent. Top assignee: Tokyo Electron Limited. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Tomoyuki Gomi: Innovator in Source Gas Supply Technology
Introduction
Tomoyuki Gomi is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of gas supply methods, particularly in the context of film forming systems. His innovative approach has led to the development of a unique patent that enhances the efficiency of source gas supply.
Latest Patents
Tomoyuki Gomi holds a patent for a source gas supply method, source gas supply mechanism, and film forming system. This patent describes a method for supplying a source gas to a processing part through a line by utilizing a carrier gas. The source gas is generated by vaporizing a film forming source, which is stored in a source container that is heated. The method includes replacing the filling gas in the source container with a replacement gas that does not deteriorate the source gas. It also involves measuring the pressure in the line to determine if the replacement has been successfully performed before heating the source container and supplying the source gas.
Career Highlights
Tomoyuki Gomi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His work at this organization has allowed him to focus on advancing technologies related to gas supply systems.
Collaborations
One of his notable collaborators is Masayuki Moroi, with whom he has worked closely on various projects related to their field of expertise.
Conclusion
Tomoyuki Gomi's contributions to the field of source gas supply technology exemplify the innovative spirit of modern inventors. His patent reflects a significant advancement in the efficiency of film forming systems, showcasing his dedication to improving industrial processes.