Location History:
- Kurokawa-gun, JP (2023)
- Miyagi, JP (2024)
Company Filing History:
Years Active: 2023-2024
Title: The Innovative Mind of Tomoya Ujiie
Introduction: Tomoya Ujiie, hailing from Kurokawa-gun, Japan, is an accomplished inventor known for his significant contributions to the field of plasma processing technology. With a total of two patents to his name, Ujiie's work focuses on advancements that promise to enhance the efficiency and effectiveness of plasma processing apparatuses.
Latest Patents: Among Ujiie’s latest inventions is the Plasma Processing Apparatus. This sophisticated device comprises a processing chamber, a placing table for substrates, and an upper electrode positioned to face the placing table. A notable feature of this apparatus is its temperature adjustment mechanism for the upper electrode, which includes a first sensor to accurately measure its temperature. Additionally, a first sheet member with a relative dielectric constant of 2.4 or higher at a frequency of 1 MHz is strategically placed between the upper electrode and the first sensor, ensuring precise performance in various processing conditions.
Another significant invention by Ujiie is related to the focus ring, which serves to enhance the functionalities of various plasma processing setups.
Career Highlights: Tomoya Ujiie works at Tokyo Electron Limited, a leading company in the semiconductor equipment industry. His role involves pushing the boundaries of current technologies and continuously seeking innovative solutions that cater to the advanced needs of manufacturing processes.
Collaborations: Throughout his career, Ujiie has had the opportunity to collaborate with talented professionals such as Yasuharu Sasaki and Yohei Uchida. These collaborations have been pivotal in fostering creativity and driving forward the innovations that characterize Ujiie's work.
Conclusion: Tomoya Ujiie stands out as a visionary inventor whose contributions to plasma processing technology are shaping the future of the industry. With his latest patents and collaborative efforts, he continues to pave the way for new innovations that benefit the technological landscape.