Tomonori Kuwamoto

Title: Tomonori Kuwamoto: Innovator in Film Deposition Technology

Introduction

Tomonori Kuwamoto is a notable inventor based in Iwate, Japan. He has made significant contributions to the field of film deposition technology. His innovative work has led to the development of a unique apparatus that enhances the efficiency of gas discharge processes.

Latest Patents

Kuwamoto holds a patent for a film deposition apparatus. This invention involves a first process gas nozzle equipped with rectifying members that include a coolant flow passage arranged in a concertinaing manner. The design allows for the cooling of the nozzle using a coolant that is at a temperature higher than the liquefaction temperature of the source gas but lower than its thermal decomposition temperature. This innovative approach improves the performance and reliability of the gas discharge process.

Career Highlights

Tomonori Kuwamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to focus on advancing film deposition technologies, contributing to the overall progress in the field.

Collaborations

Kuwamoto collaborates with Yu Wamura, a fellow innovator in the industry. Their partnership has fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Tomonori Kuwamoto's contributions to film deposition technology exemplify the spirit of innovation. His patent and work at Tokyo Electron Limited highlight his commitment to advancing the field. His collaboration with Yu Wamura further enhances the potential for future breakthroughs in this area.