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Tomoko Wake

USPTO Granted Patents = 9

Average Co-Inventor Count = 2.1

ph-index = 6

Forward Citations = 137(Granted Patents)

Location History:

Toyko, JP (2001)
Tokyo, JP (2002 - 2005)

Company Filing History:

3 out of 35,756

Nec Corporation

Nec Electronics Corporation

4 out of 832,912

Other

patents

Years Active: 2001-2005

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9 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6930037 - Process for forming a metal interconnect (2005-08-16),

2. 6867139 - Method of manufacturing semiconductor device (2005-03-15),

3. 6725119 - Cleaning-apparatus line configuration and designing process therefor (2004-04-20),

4. 6585786 - Slurry for chemical mechanical polishing (2003-07-01),

5. 6585568 - Chemical mechanical polishing slurry (2003-07-01),

6. 6530968 - Chemical mechanical polishing slurry (2003-03-11),

7. 6478834 - Slurry for chemical mechanical polishing (2002-11-12),

8. 6436811 - Method of forming a copper-containing metal interconnect using a chemical mechanical planarization (CMP) slurry (2002-08-20),

9. 6319801 - Method for cleaning a substrate and cleaning solution (2001-11-20),

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