Company Filing History:
Years Active: 2019-2025
Title: Tomohiro Takahashi: Innovator in Substrate Processing Technology
Introduction
Tomohiro Takahashi is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 5 patents. His innovative work focuses on methods and apparatuses that enhance the quality and efficiency of substrate processing.
Latest Patents
Takahashi's latest patents include a substrate processing method and a substrate processing apparatus. The substrate processing method involves performing an etching process on a substrate using an etching solution within a processing tank. This method is particularly effective for substrates that include silicon oxide films and silicon nitride films stacked alternately. The etching solution contains phosphoric acid, and the method includes immersing the substrate in this solution while replenishing it with phosphoric acid during the etching process. This approach allows for a variation in silicon concentration within the etching solution.
The substrate processing apparatus patent describes a system where at least part of a processing liquid flowing upward in a storage space is split into multiple upflows directed towards a substrate held by a substrate holder. This design ensures that many upflows are widely dispersed in the processing liquid, while suppressing the generation of downflows in the storage space. Consequently, bubbles are uniformly supplied to the substrate, enabling high-quality substrate processing.
Career Highlights
Takahashi is currently employed at Screen Holdings Co., Ltd., a company known for its advancements in imaging and display technologies. His work at Screen Holdings has allowed him to further develop his innovative ideas and contribute to the company's success in the substrate processing sector.
Collaborations
Throughout his career, Takahashi has collaborated with notable colleagues, including Kei Takechi and Mitsutoshi Sasaki. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Tomohiro Takahashi is a distinguished inventor whose work in substrate processing technology has led to significant advancements in the field. His innovative patents and collaborations with esteemed colleagues highlight his commitment to enhancing substrate processing methods and apparatuses.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.