The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2021
Filed:
Aug. 27, 2019
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Tomohiro Takahashi, Kyoto, JP;
Kei Takechi, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30604 (2013.01); H01L 21/0217 (2013.01); H01L 21/02343 (2013.01); H01L 21/31111 (2013.01); H01L 21/6708 (2013.01); H01L 21/67086 (2013.01); H01L 21/67248 (2013.01); H01L 21/67757 (2013.01);
Abstract
A substrate processing method includes a first processing step of processing a substrate using phosphoric acid set to a first temperature in a processing tank, and a second processing step of processing the substrate using phosphoric acid set to a second temperature in the processing tank.