Tomohiko Akiyama

Title: The Innovations of Tomohiko Akiyama

Introduction

Tomohiko Akiyama is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology. With a total of two patents to his name, Akiyama's work has had a considerable impact on the industry.

Latest Patents

Akiyama's latest patents include a plasma processing apparatus and a plasma processing method. The disclosed substrate support of the plasma processing apparatus features an electrostatic chuck that holds an edge ring. This electrostatic chuck consists of a first electrode and a second electrode. During the execution of a first plasma processing on a substrate, first potentials, which are either the same or different from each other, are set to the first and second electrodes, respectively. In the execution of a second plasma processing on the substrate, second potentials, which are different from the first, are set to the first and second electrodes. The respective potentials of the first electrode and the second electrode are switched from the first potentials to the second potentials.

Career Highlights

Tomohiko Akiyama is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in plasma processing technology.

Collaborations

Akiyama has collaborated with several talented individuals in his field, including Junichi Sasaki and Yasuharu Sasaki. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of new technologies.

Conclusion

Tomohiko Akiyama's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his importance as an inventor. His innovative approaches continue to shape the future of the industry.