Location History:
- Chiba, JP (1994 - 1999)
- Tokyo, JP (1999)
- Chiyoda-ku, JP (1997 - 2000)
Company Filing History:
Years Active: 1994-2000
Title: **Innovator Spotlight: Tomoharu Katagiri and His Contributions to Semiconductor Technology**
Introduction
Tomoharu Katagiri is a notable inventor in the field of semiconductor technology, hailing from Chiba, Japan. With a total of six patents to his name, Katagiri's work primarily focuses on improving metal interconnections in semiconductor devices. His contributions have significantly enhanced the reliability and performance of miniaturized electronic applications.
Latest Patents
Among his latest patents, one of the key innovations is a method for making metal interconnections. This process involves the formation of an underlying metal film using high melting point metals such as Titanium (Ti) and Titanium Nitride (TiN) on a semiconductor substrate. Katagiri's method includes plasma etching the underlying metal film's surface in a chloride gas atmosphere, followed by the deposition of an interconnecting metal film like Aluminum (Al), Copper (Cu), Gold (Au), or Silver (Ag).
Additionally, there is an alternative method where an insulating film is applied above the semiconductor substrate with connecting holes created in it. The underlying metal film, such as TiN, is deposited using a CVD process under controlled conditions, ensuring a preferential (111) orientation that improves surface smoothness and effective coverage. These innovative metal interconnections demonstrate enhanced reliability, specifically in terms of electromigration immunity, making them advantageous for contemporary miniaturized semiconductor devices.
Career Highlights
Katagiri is currently associated with Kawasaki Steel Corporation, where he continues to pioneer advancements in semiconductor technology. His passion and expertise have led to the successful deployment of innovative techniques that are critical for the modern demands of electronics and computing.
Collaborations
In his endeavors, Tomoharu Katagiri has collaborated with esteemed colleagues including Tomohiro Ohta and Nobuyuki Takeyasu. Their shared insights and efforts have fostered an environment of innovation and ingenuity within the field.
Conclusion
Tomoharu Katagiri's contributions to semiconductor technology through his inventive approaches to metal interconnections highlight his influential role as an inventor. With a continuous commitment to advancing technological frontiers, his work stands as a testament to the importance of innovation in engineering and electronics.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.