Tomislav Lozic

Title: The Innovative Contributions of Tomislav Lozic

Introduction

Tomislav Lozic is a notable inventor based in Morgan Hill, California. He has made significant contributions to the field of semiconductor processing through his innovative patent. His work exemplifies the intersection of technology and practical application in the industry.

Latest Patents

Tomislav Lozic holds a patent titled "System and method for controlling process end-point utilizing legacy end-point system." This invention allows a second end-point determination (EPD) system to actively control the end-pointing of a semiconductor process chamber. It leverages a legacy EPD system that is already integrated with the chamber. In one embodiment, the second EPD system controls a shutter that regulates the amount of light transmitted between a plasma light source and an optical emission spectroscopy (OES) sensor of the legacy OES EPD system. The legacy OES EPD system is pre-configured to call end-point when an artificial end-point condition occurs, such as when the intensity of light falls below a pre-set threshold. When the second EPD system determines that an actual end-point condition has been reached, it closes the shutter, causing the light intensity being read by the OES sensor to fall below the pre-set threshold. This action triggers an end-point command to the chamber from the legacy OES EPD system.

Career Highlights

Tomislav Lozic is currently employed at Pivotal Systems Corporation, where he continues to develop innovative solutions in semiconductor technology. His expertise and dedication to advancing the field have made him a valuable asset to his company.

Collaborations

Tomislav has collaborated with notable colleagues, including Sherk Chung and Joseph R Monkowski. Their combined efforts contribute to the innovative environment at Pivotal Systems Corporation.

Conclusion

Tomislav Lozic's contributions to semiconductor processing through his patent demonstrate his commitment to innovation and technology. His work not only enhances the efficiency of semiconductor processes but also showcases the importance of collaboration in driving advancements in the field.