Tomas Utterback

Title: The Innovations of Tomas Utterback

Introduction

Tomas Utterback is a notable inventor based in Rimbo, Sweden. He has made significant contributions to the field of microlithography, particularly in the development of methods that enhance precision in writing on photosensitive substrates. His work is crucial for various applications, including semiconductor devices and display panels.

Latest Patents

Utterback holds a patent for a "Method for microlithographic writing with improved precision." This invention relates to a system and method for microlithographic writing on photosensitive substrates. It specifically focuses on printing patterns with extremely high precision, such as photomasks for semiconductor device patterns, display panels, integrated optical devices, and electronic interconnect structures. The system includes a light source, preferably a laser, a computer-controlled light modulator, and a lens to focus the light beam onto the substrate. Additionally, it features a device for controlling the position of the beam on the substrate, a detector for identifying deviations from the intended position, and a correcting device to minimize position errors.

Career Highlights

Tomas Utterback has been associated with Micronic Laser Systems AB, where he has contributed to advancements in laser technology and microlithography. His expertise in precision writing has positioned him as a key figure in the development of innovative solutions for the semiconductor industry.

Collaborations

Utterback has worked alongside notable colleagues, including Torbjorn E Sandstrom and Carl During. Their collaborative efforts have furthered the research and development of advanced microlithographic techniques.

Conclusion

Tomas Utterback's contributions to microlithography and precision writing have made a significant impact on the technology used in semiconductor devices and display panels. His innovative methods continue to influence the field and pave the way for future advancements.