Location History:
- Gilroy, CA (US) (2013 - 2015)
- Morgan Hill, CA (US) (2013 - 2018)
Company Filing History:
Years Active: 2013-2018
Title: Tom Stevenson: Innovator in Semiconductor Processing Technologies
Introduction
Tom Stevenson is a prominent inventor based in Morgan Hill, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of 12 patents. His innovative work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Among his latest patents, Stevenson has developed showerhead electrode assemblies for plasma processing apparatuses. These assemblies include a showerhead electrode designed for installation within a vacuum chamber, featuring an optional backing plate and a thermal control plate. The design incorporates interface members that provide thermal and electrical conductivity while mitigating particle contamination. Additionally, he has patented a coating system and method for applying atomic layer deposition (ALD) or molecular layer deposition (MLD) barrier coatings on the interior fluid wetted surfaces of components used in semiconductor substrate processing. This system ensures that process gases are effectively supplied and exhausted, facilitating the formation of high-quality barrier coatings.
Career Highlights
Stevenson is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has positioned him as a key player in advancing technologies that are critical to the semiconductor industry.
Collaborations
Throughout his career, Tom Stevenson has collaborated with notable colleagues, including Dean Jay Larson and Victor Wang. These partnerships have fostered an environment of innovation and have contributed to the successful development of new technologies in semiconductor processing.
Conclusion
Tom Stevenson is a distinguished inventor whose work in semiconductor processing has led to numerous patents and advancements in the field. His contributions continue to shape the future of semiconductor manufacturing technologies.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.