Company Filing History:
Years Active: 2001-2002
Title: The Innovations of Toby Jordan
Introduction
Toby Jordan is a notable inventor based in Gilbert, AZ, who has made significant contributions to the field of semiconductor processing. With a total of four patents to his name, he has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor wafer handling and processing.
Latest Patents
Among his latest patents is a mapping system for semiconductor wafer cassettes. This invention is an integral machine designed for polishing, cleaning, rinsing, and drying workpieces such as semiconductor wafers. The system features a load/unload station with multiple platforms for receiving cassettes of wafers to be processed. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an index table. A transfer apparatus equipped with wafer carrier elements picks up the wafers from the index table, moves them to a polishing table for polishing, and returns them to the index table for further processing. A flipper then moves the polished wafers to a cleaning station, which includes scrub stations, a rinsing station, and a spin dryer station, all connected by a system of water tracks. Finally, a wet end-effector of the robot transfers rinsed wafers to the spin dryer station, while the dry end-effector moves the dried wafers back to their original cassettes.
Another significant patent is for an automatic wafer mapping system in a wet environment on a wafer cleaner. This invention provides a method and apparatus for automatically determining the location and orientation of workpieces within a processing tool. It includes an illumination device that directs light toward the edges of the workpieces, and a vision system that processes the images obtained from the reflected light.
Career Highlights
Toby Jordan works at Speedfam-Ipec Corporation, where he continues to innovate in the semiconductor industry. His work has been instrumental in advancing the technology used in wafer processing, making it more efficient and reliable.
Collaborations
Throughout his career, Toby has collaborated with talented individuals such as Robert F. Allen and Jose R. Gonzalez-Martin. These collaborations have contributed to the development of cutting-edge technologies in the field.
Conclusion
Toby Jordan's contributions to semiconductor processing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to impact the industry positively, paving the way for future innovations.