Tiqiang Ni

Title: The Innovations of Tiqiang Ni

Introduction

Tiqiang Ni is a notable inventor based in Fremont, California. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique patent that enhances the efficiency of plasma processing chambers.

Latest Patents

Tiqiang Ni holds a patent for a "Plasma processor with coil having variable rf coupling." This invention features a coil designed to excite an r.f. plasma within a vacuum plasma processing chamber. The coil consists of multiple radially and circumferentially extending turns that connect between a pair of r.f. excitation terminals. One embodiment of this invention includes a drive mechanism that varies the r.f. field coupling coefficients between different portions of the coil and the plasma. This mechanism utilizes multiple drive shafts to adjust the coil's position relative to the plasma. Additionally, a second embodiment involves an r.f. shield with moving parts that intercepts a portion of the r.f. plasma excitation field generated by the coil.

Career Highlights

Tiqiang Ni is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in plasma processing technologies.

Collaborations

Throughout his career, Tiqiang Ni has collaborated with several talented individuals, including Wenli Z Collison and John Patrick Holland. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Tiqiang Ni's contributions to plasma processing technology exemplify the spirit of innovation. His patent and work at Lam Research Corporation highlight his commitment to advancing the field. Through collaboration and creativity, he continues to make a significant impact in the industry.