This inventor holds 2 USPTO granted patents. Top assignee: Agere Systems Inc.. Active years: 2004.
Company Filing History:
Years Active: 2004
Title: Tingkwan Cheung: Innovator in Crystalline Sample Scanning and Planarity Detection
Introduction
Tingkwan Cheung is a notable inventor based in Singapore, recognized for his contributions to the fields of material science and engineering. With a total of 2 patents, he has developed innovative technologies that enhance the understanding and manipulation of crystalline samples.
Latest Patents
Cheung's latest patents include an "Apparatus for scanning a crystalline sample and associated methods." This invention provides a comprehensive apparatus and method for scanning crystalline samples, featuring a sample holder, an electron source for generating an electron beam, and a scanning actuator for controlling the relative movement between the electron beam and the crystalline sample. The invention also includes an image processor for processing images from electrons emitted by the crystalline sample. The controller in this apparatus determines grain orientation and monitors variance in average grain orientation, ensuring precise scanning.
Another significant patent is the "Method and apparatus for detection of chemical mechanical planarization endpoint and device planarity." This invention involves monitoring the removal of a layer by detecting variations in atomic mass, which indicates layer thickness. The method allows for the termination of layer removal once the concentration of the material reaches a minimum threshold, ensuring optimal device planarity.
Career Highlights
Tingkwan Cheung is currently employed at Agere Systems Inc., where he applies his expertise in developing advanced technologies. His work has significantly impacted the field of semiconductor manufacturing and material analysis.
Collaborations
Cheung has collaborated with notable colleagues, including Kim Elshot and Erik Cho Houge, contributing to various innovative projects and enhancing the research environment at Agere Systems Inc.
Conclusion
Tingkwan Cheung's innovative patents and contributions to the field of material science demonstrate his commitment to advancing technology. His work continues to influence the industry and pave the way for future innovations.