Ting-Pi Sun

Title: Ting-Pi Sun: Innovator in Pellicle Membrane Technology

Introduction

Ting-Pi Sun is a notable inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative work on pellicle membranes. His inventions are crucial for enhancing the performance and durability of photolithography processes in semiconductor manufacturing.

Latest Patents

Ting-Pi Sun holds a patent for a pellicle membrane with improved properties. This pellicle assembly includes a pellicle membrane that features a nanotube layer formed from thick nanotube bundles. The design allows for multiple layers, resulting in a combination of long lifetime, high transmittance, low deflection, and small pore size. Additionally, a conformal coating can be applied to the outer surface of the pellicle membrane, providing protection against damage from heat and hydrogen plasma during extreme ultraviolet (EUV) exposure.

Career Highlights

Ting-Pi Sun is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His work at this leading semiconductor manufacturer has positioned him at the forefront of technological advancements in the industry. His innovative contributions have helped improve the efficiency and effectiveness of semiconductor production processes.

Collaborations

Ting-Pi Sun has collaborated with notable colleagues, including Pei-Cheng Hsu and Wei-Hao Lee. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the field.

Conclusion

Ting-Pi Sun's work on pellicle membranes represents a significant advancement in semiconductor technology. His innovative approach and dedication to improving manufacturing processes have made a lasting impact on the industry.