Phoenix, AZ, United States of America

Timothy Wayne McGaughey


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 1999

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1 patent (USPTO):Explore Patents

Title: The Innovations of Timothy Wayne McGaughey: A Pioneer in Semiconductor Cleaning Technology

Introduction: Timothy Wayne McGaughey is an accomplished inventor based in Phoenix, Arizona, known for his significant contributions to the field of semiconductor fabrication. With one patent to his name, he has developed innovative technologies that enhance the efficiency of manufacturing processes within the industry.

Latest Patents: McGaughey's noteworthy patent is titled "Partial Clean Fluorine Thermal Cleaning Process." This invention describes a method for the dynamic cleaning of semiconductor fabrication equipment, particularly focusing on quartzware. It utilizes a thermally activated source of fluorine, such as nitrogen trifluoride, applied at elevated temperatures typically consistent with process operation conditions. The innovative aspect of this process is that it terminates cleaning before the complete removal of undesired substances, allowing for a rapid restart of the cleaned equipment.

Career Highlights: Throughout his career, Timothy Wayne McGaughey has worked with prominent companies in the semiconductor industry, including Air Products and Chemicals, Inc. and Aspect Systems Inc. His experience in these organizations has equipped him with the knowledge and skills to innovate in the highly technical realm of semiconductor fabrication.

Collaborations: McGaughey has collaborated with notable colleagues such as Andrew David Johnson and Richard Vincent Pearce. Their joint efforts have contributed to advancing the technology and practices within the sector, helping to elevate standards in semiconductor manufacturing.

Conclusion: Timothy Wayne McGaughey's innovative spirit and technical expertise have led to significant advancements in semiconductor cleaning technology. Through his patent and collaborative efforts, he has made a lasting impact on the industry, showcasing the important role of inventors in driving progress and efficiency in manufacturing processes.

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