The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 1999
Filed:
Feb. 18, 1997
Applicant:
Inventors:
Andrew David Johnson, Doylestown, PA (US);
Richard Vincent Pearce, Kempton, PA (US);
Charles Anthony Schneider, Gilbert, AZ (US);
Timothy Wayne McGaughey, Phoenix, AZ (US);
Assignees:
Air Products and Chemicals, Inc., Allentown, PA (US);
Aspect Systems, Inc., Chandler, AZ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ; C25F / ;
U.S. Cl.
CPC ...
134-11 ; 216 60 ; 216 79 ;
Abstract
A method for the dynamic cleaning of semiconductor fabrication equipment and particularly quartzware with a thermally activated source of fluorine, such as nitrogen trifluoride, at an elevated temperature, typically at the process operation temperature, wherein the cleaning is terminated prior to complete cleaning and removal of undesired substances allowing rapid restart of fabrication equipment so cleaned.