Poughkeepsie, NY, United States of America

Timothy R Groves


Average Co-Inventor Count = 3.0

ph-index = 6

Forward Citations = 92(Granted Patents)


Location History:

  • Poughkeepsie, NY (US) (1988 - 2002)
  • Fulbourn, GB (2001 - 2004)

Company Filing History:


Years Active: 1988-2004

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11 patents (USPTO):

Title: The Innovative Mind of Timothy R. Groves

Introduction

Timothy R. Groves is a distinguished inventor based in Poughkeepsie, NY. With a remarkable portfolio of 11 patents, he has made significant contributions to the field of charged particle beam technology, particularly in the areas of lithography and electron beam calibration.

Latest Patents

Two of Timothy's latest patents demonstrate his innovative approach to fine-tuning electron beam processes. The first patent, entitled "Spatial Phase Locking with Shaped Electron Beam Lithography," focuses on achieving precise positioning of a shaped or patterned charged particle beam. This technique utilizes a dithered shadow pattern, ideally structured as a grid, to ensure that the light output from fiducial marks made of scintillating material is minimized when the shadow pattern intersects them. This novel method allows real-time corrections of beam positioning, thus enhancing the resolution and quality of mask-making without the need for intrusive fiducial markers.

His second patent, "Calibration Target for Electron Beams," involves a unique scattering target made from a grid of gold on a carbon substrate. The innovative target incorporates an intermediate smoothing layer that aids in creating an adequately smooth surface, crucial for the effective functioning of particle beam systems. The design also includes an optional bonding layer to enhance adhesion between the gold and the smoothing layer, showcasing Timothy's attention to the functional details of his inventions.

Career Highlights

Throughout his career, Timothy has collaborated with notable companies, including International Business Machines Corporation (IBM) and Nikon Corporation. His work in these esteemed organizations has allowed him to develop and refine groundbreaking technologies in the realm of particle beam applications.

Collaborations

Timothy's innovative journey has been aided by collaborations with talented professionals including Rodney A. Kendall and Maris A. Sturans. These partnerships have been pivotal in advancing his inventions and enhancing their practical applications in various industries.

Conclusion

Timothy R. Groves stands out as a prominent inventor whose work significantly impacts technology related to charged particle beams. With a total of 11 patents to his name, his contributions to spatial phase locking and electron beam calibration continue to influence the advancements in lithography and particle beam systems. His commitment to innovation places him among the leading figures in the field, ensuring that his legacy will be felt for years to come.

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