Timothy M Archer

Title: Innovations by Timothy M Archer

Introduction

Timothy M Archer is a notable inventor based in Portland, OR (US). He has made significant contributions to the field of dielectric structures, holding a total of 4 patents. His work focuses on methods that enhance the efficiency and effectiveness of dual-damascene applications.

Latest Patents

One of Archer's latest patents involves methods for making dual-damascene dielectric structures. This patent describes a dielectric structure and method for creating a dielectric structure over a substrate. The process includes forming a barrier layer over the substrate, followed by an inorganic dielectric layer, and a low dielectric constant layer. The method also details the formation of a trench in the low dielectric constant layer using a first etch chemistry, which is timed to etch through a partial thickness of the layer. Additionally, a via hole is formed in the inorganic dielectric layer using a second etch chemistry, ensuring that the via is within the trench. Specific examples of materials used include un-doped TEOS oxide or fluorine-doped oxide for the inorganic dielectric layer, and carbon-doped oxide (C-oxide) or other low K dielectrics for the low dielectric constant layer.

Career Highlights

Throughout his career, Timothy M Archer has worked with prominent companies, including Lam Research Corporation. His experience in the industry has allowed him to develop innovative solutions that address complex challenges in semiconductor manufacturing.

Collaborations

Archer has collaborated with notable professionals in his field, including Jay E Uglow and Nicolas J Bright. These collaborations have contributed to the advancement of technology in dielectric structures.

Conclusion

Timothy M Archer's contributions to the field of dielectric structures through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the semiconductor industry positively.