Company Filing History:
Years Active: 2017
Title: The Innovations of Timothy Goodwin
Introduction
Timothy Goodwin is an accomplished inventor based in Mountain View, CA. He has made significant contributions to the field of technology, particularly in the area of measuring properties in through-silicon via (TSV) structures. With a total of 2 patents to his name, Goodwin's work has had a notable impact on production processes in the semiconductor industry.
Latest Patents
Goodwin's latest patents include "Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry." This invention discloses methods and apparatus for measuring characteristics of a TSV structure. A beam profile reflectivity (BPR) tool is utilized to move to a specific xy position containing a TSV structure. The BPR tool then obtains an optimum focus by adjusting the z position, allowing for accurate measurements. Reflectivity measurements for various angles of incidence are collected, enabling the determination of one or more film thicknesses for the TSV structure. Additionally, a z position can be recorded to ascertain the height of the TSV structure and adjacent xy positions.
Another significant patent is "Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy." This invention employs photoreflectance spectroscopy to measure strain at or near the edge of a wafer during production. The strain measurements help anticipate defects and facilitate prospective corrections in later production stages. By associating various production steps with defects, Goodwin's work enhances the efficiency of subsequent production processes.
Career Highlights
Timothy Goodwin is currently employed at Kla Tencor Corporation, where he continues to innovate and contribute to advancements in semiconductor technology. His expertise in measuring properties and strain in production processes has positioned him as a valuable asset in his field.
Collaborations
Goodwin has collaborated with notable colleagues, including Lena Nicolaides and Shifang Li, further enriching his work and contributions to the industry.
Conclusion
Timothy Goodwin's innovative patents and career at Kla Tencor Corporation highlight his significant role in advancing semiconductor technology. His contributions continue to influence production processes and improve efficiency in the industry.