Company Filing History:
Years Active: 1998-2001
Title: Innovations of Timothy E. Levine
Introduction
Timothy E. Levine is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the performance and reliability of materials used in electronic devices.
Latest Patents
One of his latest patents is titled "Method for treating a deposited film for resistivity reduction." This invention describes a method for reducing the resistivity of a copper layer on a wafer. A moisture-containing seed layer of copper is formed over a layer of material on the wafer. The copper seed layer is treated by either heat or ions from a plasma to anneal out moisture, thereby reducing its resistivity and improving its adhesion to the underlying layer. A moisture-free copper layer is then deposited on top of the treated copper seed layer.
Another significant patent is "Construction of a tantalum nitride film on a semiconductor wafer." This patent outlines the construction of a film on a wafer, which is placed in a processing chamber. A layer of tantalum nitride material is deposited on the wafer, followed by annealing. Notably, both deposition and annealing can be accomplished in the same chamber, eliminating the need to remove the wafer until both steps are completed.
Career Highlights
Timothy has worked with prominent organizations such as Applied Materials, Inc. and the University of California. His experience in these institutions has allowed him to develop innovative solutions that address critical challenges in semiconductor manufacturing.
Collaborations
Throughout his career, Timothy has collaborated with talented individuals, including Ling Chen and Mei Yin Chang. These partnerships have contributed to the advancement of his research and inventions.
Conclusion
Timothy E. Levine's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative methods continue to impact the industry positively.