Applied Materials, Inc.

University of California

Timothy E Levine

Mei Yin Chang

Ling Chen

Ivo Johannes Raaijmakers

Seshadri Ganguli

Karl Anthony Littau

Bo Zheng

Roderick Craig Mosely

Mohan K Bhan

Michael A Nastasi

James W Mayer

Vincent B Pizziconi

Samuel C Wilson

Justin Jones

A method for reducing the resistivity of a copper layer on a wafer. A moisture containing seed layer of copper is formed over a layer of material on a wafer. The copper seed layer is treated by either heat or ions from a plasma to anneal out moisture thereby reducing its resistivity and improving its adhesion to the underlying layer. A moisture free copper layer is then deposited on top of the &ldquo;clean&rdquo; or treated copper seed layer.

Method for treating a deposited film for resistivity reduction

The construction of a film on a wafer, which is placed in a processing chamber, may be carried out through the following steps. A layer (film) of tantalum nitride material is deposited on the wafer. Next, the layer of tantalum nitride material is annealed. The deposition and annealing may both be accomplished in the same chamber, without need for removing the wafer from the chamber until both steps are completed.

Construction of a tantalum nitride film on a semiconductor wafer

Processing of hydroxylapatite sol-gel films on titanium alloy bone prostheses. A method utilizing non-line-of-sight ion beam implantation and/or rapid thermal processing to provide improved bonding of layers of hydroxylapatite to titanium alloy substrates while encouraging bone ingrowth into the hydroxylapatite layers located away from the substrate, is described for the fabrication of prostheses. The first layer of hydroxylapatite is mixed into the substrate by the ions or rapidly thermally annealed, while subsequent layers are heat treated or densified using ion implantation to form layers of decreasing density and larger crystallization, with the outermost layers being suitable for bone ingrowth.

Processing of hydroxylapatite coatings on titanium alloy bone prostheses

Growing community of inventors

Santa Clara, CA, United States of America

Timothy E Levine